Publications

Inductive coupling for increased bandwidth of aluminum nitride contour-mode microresonator filters

Nordquist, Christopher N.; Henry, M.D.; Nguyen, Janet H.; Clews, Peggy; Lepkowski, Stefan M.; Grine, Alejandro J.; Dyck, Christopher D.; Olsson, Roy H.

Inductive coupling and matching networks are used to increase the bandwidth of filters realized with aluminum nitride contour-mode resonators. Filter bandwidth has been doubled using a wirebonded combination of a wafer-level-packaged resonator chip and a high-Q integrated inductor chip. The three-pole filters have a center frequency near 500 MHz, an area of 9 mm × 9 mm, insertion loss of < 5 dB for a bandwidth of 0.4%, and a resonator unloaded Q of 1600.