Publications

High speed (GHZ), ultra-high pressure (GPA) sensor array fabricated in integrated CMOS+MEMS process

Okandan, Murat O.; Olsson, Roy H.; Baker, Michael; Resnick, Paul J.; Hill, Thomas A.; Lackey, Chad; Pearson, Sean P.; Castaneda, Jaime N.; Trott, Wayne T.; Jones, David A.

In order to observe and quantify pressure levels generated during testing of energetic materials, a sensor array with high temporal resolution (∼1 ns) and extremely high pressure range (> 1 GPa) is needed. We have developed such a sensor array which utilizes a novel integrated high performance CMOS+MEMS process. ©2009 IEEE.