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High single mode operation from hybrid ion implanted/selectively oxidized VCSELs

Choquette, K.D.; Fischer, Arthur J.; Geib, K.M.; Hadley, G.R.; Allerman, A.A.; Hindi, J.J.

Selectively oxidized vertical cavity surface emitting lasers (VCSEL) typically operate in multiple transverse optical modes. High power VCSEL operation is desirable for many applications such as optical storage and printing, modulation spectroscopy, bar code scanning, and data communication over single mode optical fiber. The modal discrimination can be augmented by creating a central region of gain surrounded by a region of optical loss. A VCSEL fabricated via hybrid ion implantation and selective oxidation device structure is designed to demonstrate a single mode output of more than 5 mW for 850 nm.