Publications

High-Q integrated on-chip microring resonator

Vawter, Gregory A.; Hadley, G.R.; Esherick, Peter E.; Sullivan, Charles T.

We report a fully integrated high-Q factor micro-ring resonator using silicon nitride/dioxide on a silicon wafer. The micro-ring resonator is critically coupled to a low loss straight waveguide. An intrinsic quality factor of 2.4 x 10{sup 5} has been measured.