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Flexible, large-area metamaterials fabricated on thin silicon nitride membranes

Peralta, X.G.; Arrington, C.L.; Wanke, M.C.; Brener, Igal B.; Williams, John D.; Smirnova, E.; Taylor, A.J.; O'Hara, J.F.; Strikwerda, A.; Averitt, R.D.; Padilla, W.J.

We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs. © 2008 Optical Society of America.