Publications

Finite element based electrostatic-structural coupled analysis with automated mesh morphing

Zhulin, V.I.; Owen, Steven J.; Ostergaard, D.F.

A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool has been successfully applied to the hysteric behavior of a MEMS switch.