Publications

Fabrication of cubic micron-scale 3D metamaterial resonators

Burckel, David B.; Ten Eyck, Gregory A.; Wendt, J.R.; Brener, Igal B.; Sinclair, Michael B.

We present a new fabrication technique called Membrane Projection Lithography for the production of three-dimensional metamaterials at infrared wavelengths. Using this technique, multilayer infrared metamaterials that include both in-plane and out-of-plane resonators can be fabricated.