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Enhancement-mode AlGaN channel high electron mobility transistor enabled by p-AlGaN gate

Douglas, Erica A.; Klein, Brianna A.; Allerman, A.A.; Baca, A.G.; Fortune, Torben R.; Armstrong, Andrew A.

This work exhibits the ability to shift the threshold voltage of an Al0.45Ga0.55N/Al0.3Ga0.7N high electron mobility transistor through the implementation of a 100 nm thick p-Al0.3Ga0.7N gate. A maximum threshold voltage of +0.3 V was achieved with a 3 μm gate length. In addition to achieving enhancement-mode operation, this work also shows the capability to obtain high saturated drain current (>50 mA/mm), no gate hysteresis, high ION,MAX/IOFF,MIN ratio of >109, and exceptionally low gate leakage current of 10-6 mA/mm even under high forward bias of Vgs = 8 V.