Enhanced Lithography Using an Electrochemical Technique to Monitor the Endpoint
Baca, Kalin B.; Coleman, Jonathan J.; Pillars, Jamin R.; Finnegan, Patrick S.; Perez, Carlos P.; Seazzu, Micaela E.; Dyer, Isaac D.; St John, Christopher S.; Hollowell, Andrew E.; Dagel, Amber L.; Arrington, Christian L.
Abstract not provided.