Publications

Effect of electrostatic force on vibration of micro cantilever beams

Sumali, Hartono S.; Epp, David E.

When a micro cantilever beam is excited by base shaking, electrostatic force makes the tip displacement response nonlinear with respect to the base acceleration input. This paper derives a single-degree-of-freedom model for the deflection in a micro cantilever due to electrostatic voltage for this excitation. The tip deflection due to electrostatic force is derived first as part of the total tip deflection, and then in terms of an equivalent base excitation. The relationship between electrostatic deflection and equivalent base excitation is determined numerically, but can be represented accurately by a simple curve-fit function.