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Diffusional kinetics of SiGe dimers on Si(100) using atom-tracking scanning tunneling microscopy

Qin, X.R.; Swartzentruber, Brian S.; Lagally, M.G.

Atom-tracking scanning tunneling microscopy (AT-STM) was applied to the study of Ge-Si dimer diffusion. It was possible to measure real-time atomic intermixing, determine directly the time and the lattice site at which the intermixing occurs.