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Design, fabrication, and characterization of metal micromachined rectangular waveguides at 3 THz

Nordquist, Christopher D.; Wanke, Michael W.; Rowen, Adam M.; Arrington, Christian L.; Lee, Mark L.; Grine, Albert D.

Single-mode 75 μm × 37 μm rectangular waveguide components, including horn antennas, couplers, and bends, for operation at 3 THz have been designed and fabricated using thick gold micromachining. THz transmission through these waveguides has been quasi-optically measured at 2.92 THz. This technology offers the potential for realizing miniature integrated systems operating in the 3 THz frequency range. © 2008 IEEE.