Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films
Fields, Shelby S.; Olson, David O.; Jaszwecki, Samantha T.; Fancher, Chris F.; smith, sean w.; Dickie, Diane U.; Esteves, Giovanni E.; Henry, Michael D.; Davids, Paul D.; Hopkins, Patrick E.; Ihlefeld, Jon F.
Abstract not provided.