Publications

Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf_1-xZr_xO₂ thin films

Fields, Shelby S.; Olson, David O.; Jaszwecki, Samantha T.; Fancher, Chris F.; smith, sean w.; Dickie, Diane U.; Esteves, Giovanni E.; Henry, Michael D.; Davids, Paul D.; Hopkins, Patrick E.; Ihlefeld, Jon F.

Abstract not provided.