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Carrier Diffusion Lengths in Continuously Grown and Etched-and-Regrown GaN Pin Diodes

Celio, K.C.; Armstrong, Andrew A.; Talin, A.A.; Allerman, A.A.; Crawford, Mary H.; Pickrell, Gregory P.; Leonard, Francois L.

Advanced GaN power devices are promising for many applications in high power electronics but performance limitations due to material quality in etched-and-regrown junctions prevent their widespread use. Carrier diffusion length is a critical parameter that not only determines device performance but is also a diagnostic of material quality. Here we present the use of electron-beam induced current to measure carrier diffusion lengths in continuously grown and etched-and-regrown GaN pin diodes as models for interfaces in more complex devices. Variations in the quality of the etched-and-regrown junctions are observed and shown to be due to the degradation of the n-type material. We observe an etched-and-regrown junction with properties comparable to a continuously grown junction.