Publications

B- and Al- Doped Delta Layers in Si Using Halogen-Based Precursors

Baek, S.B.; Farzani, A.F.; Radue, M.S.R.; Campbell, Quinn C.; Dwyer, K.J.D.; Baczewski, Andrew D.; Mo, Y.M.; Misra, Shashank M.; Butera, R.E.B.

Abstract not provided.