Publications

Automated analysis of failure event data

Campbell, James E.; Thompson, Bruce M.; Thompson, Bruce M.

This paper focuses on fully automated analysis of failure event data in the concept and early development stage of a semiconductor-manufacturing tool. In addition to presenting a wide range of statistical and machine-specific performance information, algorithms have been developed to examine reliability growth and to identify major contributors to unreliability. These capabilities are being implemented in a new software package called Reliadigm. When coupled with additional input regarding repair times and parts availability, the analysis software also provides spare parts inventory optimization based on genetic optimization methods. The type of question to be answered is: If this tool were placed with a customer for beta testing, what would be the optimal spares kit to meet equipment reliability goals for the lowest cost? The new algorithms are implemented in Windows{reg_sign} software and are easy to apply. This paper presents a preliminary analysis of failure event data from three IDEA machines currently in development. The paper also includes an optimal spare parts kit analysis.