Publications

Atomic precision advanced manufacturing (APAM) of ultra-doped nanostructures for advanced CMOS devices and interconnects

Scrymgeour, David S.; Frederick, Esther F.; Halsey, Connor H.; Campbell, DeAnna M.; Anderson, Evan M.; Schmucker, Scott W.; Ivie, Jeffrey A.; Gao, Xujiao G.; Lu, Tzu-Ming L.; Tracy, Lisa A.; Misra, Shashank M.

Abstract not provided.