Publications
Application of short pulsed laser systems for micro-scale processing
The relatively recent development of short (nsec) and ultra-short (fsec) pulsed laser systems has introduced process capabilities which are particularly suited for micro-manufacturing applications. Micrometer feature resolutions and minimal heat affected zones are commonly cited benefits, although unique material interactions also prove attractive for many applications. A background of short and ultra-short pulsed laser system capabilities and material interactions will be presented for micro-scale processing. Processing strengths and limitations will be discussed and demonstrated within the framework of applications related to micro-machining, material surface modifications, and fundamental material science research.