Publications

An automated electrochemical probe for evaluation of thin films

Small, Leo; Cook, Adam W.; Apblett, Christopher A.; Ihlefeld, Jon I.; Brennecka, Geoffrey L.; Duquette, David

An electrochemical probe station (EPS) for automated electrochemical testing of electronic-grade thin films is presented. Similar in design to a scanning droplet cell, this modular system features a flexible probe tip capable of contacting both metallic and oxide surfaces. Using the highly sensitive Pt-H 2SO 4 system, it is demonstrated that the EPS obtains results equivalent to those of a traditional electrochemical cell. Further, electrical testing of thin film PbZr 0.52Ti 0.48O 3 shows that this system may be used to ascertain fundamental electrical properties of dielectric films. © 2012 The Electrochemical Society.