Publications

3-D Full-Band Monte Carlo Simulation of Hot-Electron Energy Distributions in Gate-All-Around Si Nanowire MOSFETs

Reaz, Mahmud R.; Tonigan, Andrew M.; Li, Kan L.; Smith, Brandon S.; Rony, Mohammed R.; Gorchichko, Mariia G.; O'Hara, Andrew O.; Linten, Dimitri L.; Mitard, Jerome M.; Fang, Jingtian F.; Zhang, En X.; Alles, Michael L.; Weller, Robert W.; Fleetwood, Daniel M.; Reed, Robert S.; Pantelides, Sokrates T.; Weeden-Wright, Stephanie L.; Schrimpf, Ronald D.

The energy distributions of electrons in gate-all-around (GAA) Si MOSFETs are analyzed using full-band 3-D Monte Carlo (MC) simulations. Excellent agreement is obtained with experimental current–voltage characteristics. For these 24-nm gate length devices, the electron distribution features a smeared energy peak with an extended tail. This extension of the tail results primarily from the Coulomb scattering within the channel. A fraction of electrons that enter the drain retains their energy, resulting in an out-of-equilibrium distribution in the drain region. The simulated density and average energy of the hot electrons correlate well with experimentally observed device degradation. We propose that the interaction of high-energy electrons with hydrogen-passivated phosphorus dopant complexes within the drain may provide an additional pathway for interface-trap formation in these devices.